This paper presents an active phase shifter for phased array system applications, implemented using 0.18 μm SiGe BiCMOS technology. The phase shifter circuit consists of a wideband quadrature signal generator, a vector modulator, an input balun, and an output balun. To enhance the bandwidth, a polyphase filter is employed as the quadrature signal generator, and a two-stage RC-CR filter with a highly symmetrical miniaturized layout is cascaded to create multiple resonant points, thus extending the phase shifter’s bandwidth to cover the required range. The gain of the variable-gain amplifier within the vector modulator is adjustable by varying the tail current, thereby enlarging the range of selectable points, improving phase-shifting accuracy, and reducing gain fluctuations. The measurement results show that the proposed active phase shifter achieves an RMS phase error of less than 2◦ and a gain variation ranging from −1.2 dB to 0.1 dB across a 20 GHz to 30 GHz bandwidth at room temperature. The total chip area is 0.4 mm2, with a core area of 0.165 mm2, and consumes 19.5 mW of power from a 2.5 V supply.
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